Shiro HONDA*, Masayuki TANAKA†, Yasushi SAWAMURA††, Atsuto TOKUNAGA††† and Keiji KAYABA†††
Chemicals Research Laboratories, Toray Industries, Inc.; 9-1, Oe-cho, Minato-ku, Nagoya-shi 455-8502 Japan † Present address: Toray Research Center Inc.; 3-1-8, Nihonbashimuromachi, Chuou-ku, Tokyo 103-0022 Japan †† Present address: Electronic Materials Technical Department, Toray Industries, Inc.; 1-1-1, Sonoyama, Ootsu-shi 520-8558 Japan ††† Electronic Materials Technical Department, Toray Industries, Inc.; 9-1, Oe-cho, Minato-ku, Nagoya-shi 455-8502 Japan